Abrasive-Free Chemical Polishing of Hard Disk Substrate with Benzoyl Peroxide-H2O2 Slurry
Jiang, Ting, Lei, HongVolume:
551
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.551.66
Date:
May, 2014
File:
PDF, 871 KB
english, 2014