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Contact Resistivity of NiPtSi on n-doped Silicon Activated by Laser Annealing
Pagette, Francois, Solomon, Paul M, Kozlowski, Paul M, Topol, Anna W, Haensch, WilfriedVolume:
1108
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1108-A11-02
Date:
January, 2008
File:
PDF, 102 KB
english, 2008