Quantified Conditions for Reduction of ESO Contamination During SiC Metalization
McDaniel, G.Y., Fenstermaker, S.T., Walker Jr., D.E., Lampert, W.V., Mukhopadhyay, S.M., Holloway, P.H.Volume:
338-342
Year:
2000
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.407
File:
PDF, 394 KB
english, 2000