Scaling of Hafnium-based High-k Dielectrics

MRS Proceedings 2007 / 1 Vol. 996

Triyoso, Dina H., Hegde, Rama I., Gregory, Rich, Gilmer, David C., Schaeffer, James K., Samavedam, Srikanth B., Kaushik, Vidya, Rochat, Nevine

How much do you like this book?

What’s the quality of the file?

Download the book for quality assessment

What’s the quality of the downloaded files?

Volume:

996

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/PROC-0996-H03-01

Date:

January, 2007

File:

PDF, 1.41 MB

english, 2007

Conversion to is in progress

Conversion to is failed