Relationship between Precursor Gas Flow Rate with the...

Advanced Materials Research 2014 / 6 Vol. 970

Relationship between Precursor Gas Flow Rate with the Structural and Morphology Properties of Diamond like Carbon Films

Kit, Ong Wai, Deraman, Karim, Wan Shamsuri, Wan Nurulhuda, Keng Yik, Jackie Chen
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Volume:
970
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.970.128
Date:
June, 2014
File:
PDF, 336 KB
english, 2014
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