Effect of Line Geometries on Textures in Damascene Cu Lines

Effect of Line Geometries on Textures in Damascene Cu Lines

Paik, Jong Min, Joo, Young Chang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
408-412
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.408-412.1555
File:
PDF, 412 KB
2002
Conversion to is in progress
Conversion to is failed