Minimization of Ga Induced FIB Damage Using Low Energy...

Microscopy and Microanalysis 2006 / 8 Vol. 12; Iss. S02

Minimization of Ga Induced FIB Damage Using Low Energy Clean-up

Thompson, K, Gorman, B, Larson, D, Leer, B van, Hong, L
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Volume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606065457
Date:
August, 2006
File:
PDF, 187 KB
english, 2006
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