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Minimization of Ga Induced FIB Damage Using Low Energy Clean-up
Thompson, K, Gorman, B, Larson, D, Leer, B van, Hong, LVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606065457
Date:
August, 2006
File:
PDF, 187 KB
english, 2006