Logic compatible process technology for embedded atom...

Japanese Journal of Applied Physics 2015 / 05 Vol. 54; Iss. 5S

Logic compatible process technology for embedded atom switches in CMOS

Okamoto, Koichiro, Tada, Munehiro, Banno, Naoki, Iguchi, Noriyuki, Sakamoto, Toshitsugu, Hada, Hiromitsu
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Volume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.05ED05
Date:
May, 2015
File:
PDF, 2.16 MB
english, 2015
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