TEM investigation of defect reduction and etch pit...

MRS Proceedings 2003 / 1 Vol. 798

TEM investigation of defect reduction and etch pit formation in GaN

Vennemann, Angelika, Dennemarck, Jens, Kröger, Roland, Böttcher, Tim, Hommel, Detlef, Ryder, Peter

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Volume:

798

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/PROC-798-Y5.22

Date:

January, 2003

File:

PDF, 303 KB

english, 2003

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