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Self-aligned Amorphous Silicon Thin Film Transistors with Mobility above 1 cm2V−1s−1 fabricated at 300°C on Clear Plastic Substrates
Cherenack, Kunigunde H, Kattamis, Alex Z, Hekmatshoar, Bahman, Sturm, James C, Wagner, SigurdVolume:
1066
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1066-A20-03
Date:
January, 2008
File:
PDF, 446 KB
english, 2008