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X-Ray Diffraction Microstructural Characterization of PZT (Pb(ZrxTi1-x)O3 and Pt Thin Films on TiN/Ti/BPSG/Si Structures
Varnière, F., Ea Kim, B., Bisaro, R., Chevrier, G.Volume:
228-231
Year:
1996
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.228-231.487
File:
PDF, 393 KB
1996