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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Modeling Copper CMP Material Removal Rates Using Copper Surface Nanohardness
Ihnfeldt, Robin V., Talbot, Jan B.Volume:
13
Year:
2008
Language:
english
DOI:
10.1149/1.2912977
File:
PDF, 286 KB
english, 2008