Texture Evolution in Thin Cu Films and Lines

Texture Evolution in Thin Cu Films and Lines

Field, David P., Sanchez, John E., Park, No Jin, Besser, Paul R.
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Volume:
495-497
Year:
2005
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.495-497.1323
File:
PDF, 2.63 MB
2005
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