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Accurate CsM+ SIMS Aluminum Dopant Profiling in SiC
Smith, Howard E., Tsao, Bang Hung, Scofield, James D.Volume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.629
File:
PDF, 344 KB
english, 2006