Gas Sensing with Atomic Layer Deposited Dielectric Thin...

Key Engineering Materials 2014 / 4 Vol. 605

Gas Sensing with Atomic Layer Deposited Dielectric Thin Film

Dam, V.A.T., Blauw, M.A., Brongersma, S.H., van Schaijk, R.
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Volume:
605
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.605.71
Date:
April, 2014
File:
PDF, 475 KB
english, 2014
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