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Tuning Residual Stress in 3C-SiC(100) on Si(100)
Pezoldt, Jörg, Stauden, Thomas, Niebelschütz, Florentina, Alsioufy, Mohamad Adnan, Nader, Richard, Masri, Pierre M.Volume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.159
Date:
April, 2010
File:
PDF, 276 KB
english, 2010