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Site Identification of 6H-SiC Using RBS/Channeling Technique
Satoh, Masataka, Okamoto, K., Iwata, Y., Kuriyama, K., Kanaya, M., Ohtani, NoboruVolume:
264-268
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.264-268.441
File:
PDF, 282 KB
1998