Mechanically Induced Growth Rate Differential for Copper...

Mechanically Induced Growth Rate Differential for Copper Layers Electroplated in Presence of Organic Additives

Başol, Bülent M., Durmuş, Ayşe, Wang, Tony, Erdemli, Serkan, Bogart, Jeff
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Volume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2223993
File:
PDF, 393 KB
english, 2006
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