A Novel Ultra-miniature catheter tip pressure sensor fabricated using silicon and glass thinning techniques
Allen, Henry, Ramzan, Kamrul, Knutti, Jim, Withers, StanVolume:
681
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-681-i7.4
Date:
January, 2001
File:
PDF, 170 KB
english, 2001