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Successful Growth of Conductive Highly Crystalline Sn-Doped $\alpha$-Ga$_{2}$O$_{3}$ Thin Films by Fine-Channel Mist Chemical Vapor Deposition
Kawaharamura, Toshiyuki, Dang, Giang T., Furuta, MamoruVolume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.040207
Date:
March, 2012
File:
PDF, 396 KB
english, 2012