Sodium Enhanced Oxidation of Si-Face 4H-SiC: A Method to...

Materials Science Forum 2007 Vol. 556-557

Sodium Enhanced Oxidation of Si-Face 4H-SiC: A Method to Remove Near Interface Traps

Sveinbjörnsson, Einar Ö., Allerstam, Fredrik, Ólafsson, H.Ö., Gudjónsson, G., Dochev, D., Rödle, T., Jos, R.
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Volume:
556-557
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.556-557.487
File:
PDF, 345 KB
english, 2007
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