Phosphorus Diffusion in Si1-x Gex
Christensen, J.S., Kuznetsov, Andrej Yu., Radamson, H.H., Svensson, Bengt G.Volume:
194-199
Year:
2001
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.194-199.709
File:
PDF, 484 KB
2001