Internal Friction of Copper Thin Layers on Silicon...

Internal Friction of Copper Thin Layers on Silicon Substrates

von der Hagen, J., Weller, M., Arzt, E.
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Volume:
203-205
Year:
2002
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.203-205.285
File:
PDF, 292 KB
2002
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