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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Measurements of Dislocation Locking by Near-Surface Ion-Implanted Nitrogen in Czochralski Silicon
Alpass, Charles, Murphy, John, Jain, Amitabh, Wilshaw, Peter R.Volume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2980308
File:
PDF, 376 KB
english, 2008