SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Canberra, ACT, Australia (Wednesday 5 December 2007)] Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV - High sensitivity capacitive MEMS microphone with spring supported diaphragm
Mohamad, Norizan, Iovenitti, Pio, Vinay, Thurai, Tan, Hark Hoe, Chiao, Jung-Chih, Faraone, Lorenzo, Jagadish, Chennupati, Williams, Jim, Wilson, Alan R.Volume:
6800
Year:
2007
Language:
english
DOI:
10.1117/12.758987
File:
PDF, 253 KB
english, 2007