Diffusion and Solubility of Titanium in Silicon

Materials Science Forum 1989 Vol. 38-41

Diffusion and Solubility of Titanium in Silicon

Hocine, S., Mathiot, D.
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Volume:
38-41
Year:
1989
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.38-41.725
File:
PDF, 268 KB
1989
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