Uncertainty and sensitivity analysis of gas-phase chemistry in a CHF 3 plasma
Bose, Deepak, Rao, M V V S, Govindan, T R, Meyyappan, MVolume:
12
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/12/2/314
Date:
May, 2003
File:
PDF, 1.42 MB
english, 2003