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SPIE Proceedings [SPIE Smart Materials, Nano- and Micro-Smart Systems - Adelaide, Australia (Sunday 10 December 2006)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III - Low-stress silicon nitride layers for MEMS applications
Iliescu, Ciprian, Wei, Jiashen, Chen, Bangtao, Ong, Poh Lam, Tay, Francis E. H., Chiao, Jung-Chih, Dzurak, Andrew S., Jagadish, Chennupati, Thiel, David V.Volume:
6415
Year:
2007
Language:
english
DOI:
10.1117/12.696350
File:
PDF, 363 KB
english, 2007