Nanopatterning and Nanomachining with Table-top Extreme...

MRS Proceedings 2006 / 1 Vol. 961

Nanopatterning and Nanomachining with Table-top Extreme Ultraviolet Lasers

Marconi, Mario, Wachulak, Przemyslaw Wojciech, Capeluto, Maria Gabriela, Vaschenko, Georgyi, Bravo, Herman, Menoni, Carmen S, Rocca, Jorge, Anderson, Erik H, Chao, Weilun, Attwood, David, Hemberg, Osc
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Volume:
961
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0961-O06-05
Date:
January, 2006
File:
PDF, 453 KB
english, 2006
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