Comparative Study of Thermal Oxides and Post-Oxidized...

Materials Science Forum 2010 / 4 Vol. 645-648

Comparative Study of Thermal Oxides and Post-Oxidized Deposited Oxides on n-Type Free Standing 3C-SiC

Esteve, Romain, Schöner, Adolf, Reshanov, Sergey A., Zetterling, Carl Mikael
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Volume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.829
Date:
April, 2010
File:
PDF, 367 KB
english, 2010
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