![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Robust signal evaluation for Chromatic Confocal Spectral Interferometry
Boettcher, Tobias, Lehmann, Peter H., Osten, Wolfgang, Lyda, Wolfram, Gronle, Marc, Albertazzi, Armando, Mauch, Florian, Osten, WolfgangVolume:
8788
Year:
2013
Language:
english
DOI:
10.1117/12.2020558
File:
PDF, 517 KB
english, 2013