ArF Excimer Laser Micromachining of MEMS Materials: Characterization and Applications
Liu, Kewei, Kim, Yoontae, Noh, Hongseok (Moses)Volume:
2
Language:
english
Journal:
Journal of Micro and Nano-Manufacturing
DOI:
10.1115/1.4027121
Date:
April, 2014
File:
PDF, 3.67 MB
english, 2014