ArF Excimer Laser Micromachining of MEMS Materials:...

ArF Excimer Laser Micromachining of MEMS Materials: Characterization and Applications

Liu, Kewei, Kim, Yoontae, Noh, Hongseok (Moses)
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Volume:
2
Language:
english
Journal:
Journal of Micro and Nano-Manufacturing
DOI:
10.1115/1.4027121
Date:
April, 2014
File:
PDF, 3.67 MB
english, 2014
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