In-depth low frequency noise evaluation of substrate...

In-depth low frequency noise evaluation of substrate rotation and strain engineering in n-type triple gate SOI FinFETs

Doria, Rodrigo Trevisoli, de Souza, Márcio Alves Sodré, Martino, João Antonio, Simoen, Eddy, Claeys, Cor, Pavanello, Marcelo Antonio
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Volume:
147
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.04.056
Date:
November, 2015
File:
PDF, 867 KB
english, 2015
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