Machine Learning Based Lithography Hotspot Detection with...

ECS Transactions 2014 / 02 Vol. 60; Iss. 1

Machine Learning Based Lithography Hotspot Detection with Sparse Feature Encoding and Hierarchical Pattern Classification

Luo, K. s., Shi, Z., Geng, Z.
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Volume:
60
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/06001.1179ecst
Date:
February, 2014
File:
PDF, 147 KB
english, 2014
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