SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 7 February 2015)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII - Fabricating microscopic tools: towards optically actuated micro-robotics
von Freymann, Georg, Schoenfeld, Winston V., Rumpf, Raymond C., Helvajian, Henry, Phillips, David B., Padgett, Miles J., Rarity, John G., Miles, Mervyn J., Simpson, Stephen H.Volume:
9374
Year:
2015
Language:
english
DOI:
10.1117/12.2084812
File:
PDF, 988 KB
english, 2015