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The Influence of Defects and Impurities on Electrical Properties of High-k Dielectrics
Dąbrowski, Jaroslaw, Miyazaki, Seiichi, Inumiya, S., Kozłowski, G., Lippert, G., Łupina, G., Nara, Y., Müssig, Hans Joachim, Ohta, A., Pei, Y.Volume:
608
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.608.55
File:
PDF, 2.18 MB
english, 2009