Electrical Properties of Pulsed Laser Deposited Y[sub 2]O[sub 3] Gate Oxide on 4H–SiC
Quah, Hock Jin, Lim, Way Foong, Wimbush, Stuart C., Lockman, Zainovia, Cheong, Kuan YewVolume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3481926
File:
PDF, 350 KB
english, 2010