Fast and reliable simulations of argon inductively coupled...

Vacuum 2015 / 06 Vol. 116

Fast and reliable simulations of argon inductively coupled plasma using COMSOL

Brezmes, Angel Ochoa, Breitkopf, Cornelia
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Volume:
116
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2015.03.002
Date:
June, 2015
File:
PDF, 1.58 MB
english, 2015
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