Evaluation of Weakly Ionized Plasma Channel by Accumulation...

Japanese Journal of Applied Physics 2002 / 11 Vol. 41; Iss. Part 1, No

Evaluation of Weakly Ionized Plasma Channel by Accumulation Effect of Charged Particles Using High-Repetition-Rate KrF Excimer Laser

Yamaura, Michiteru, Hayashi, Nobuya, Ihara, Satoshi, Satoh, Saburoh, Yamabe, Chobei
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.6394
Date:
November, 2002
File:
PDF, 116 KB
english, 2002
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