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Dependence of structure and properties of hard nanocrystalline conductive films MBCN (M=Ti, Zr, Hf) on the choice of metal element
Houska, J., Kohout, J., Mares, P., Cerstvy, R., Vlcek, J.Volume:
586
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.04.023
Date:
July, 2015
File:
PDF, 966 KB
english, 2015