New Achievements on CVD Based Methods for SiC Epitaxial...

Materials Science Forum 2005 Vol. 483-485

New Achievements on CVD Based Methods for SiC Epitaxial Growth

Crippa, Danilo, Valente, Gian Luca, Ruggiero, Alfonso, Neri, L., Reitano, Ricardo, Calcagno, Lucia, Foti, Gaetano, Mauceri, Marco, Leone, Stefano, Pistone, Giuseppe, Abbondanza, Giuseppe, Abbagnale, G
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Volume:
483-485
Year:
2005
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.483-485.67
File:
PDF, 730 KB
english, 2005
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