Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
Kawasaki, M., Hsiao, C.N., Yang, J.R., Shiojiri, M.Volume:
74
Language:
english
Journal:
Micron
DOI:
10.1016/j.micron.2015.03.012
Date:
July, 2015
File:
PDF, 3.94 MB
english, 2015