Influence of RF power on physical properties of ZnO:ZnF2...

Superlattices and Microstructures 2015 / 07 Vol. 83

Influence of RF power on physical properties of ZnO:ZnF2 thin films by RF magnetron sputtering

Wang, Fang-Hsing, Lee, Yen-Hsien, Kang, Tsung-Kuei, Liu, Han-Wen
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Volume:
83
Language:
english
Journal:
Superlattices and Microstructures
DOI:
10.1016/j.spmi.2015.03.034
Date:
July, 2015
File:
PDF, 2.64 MB
english, 2015
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