Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2015 / 04 Vol. 348
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Beam size reduction of a several hundred-keV compact ion microbeam system by improving the extraction condition in an ion source
Ishii, Yasuyuki, Ohkubo, Takeru, Kamiya, Tomihiro, Saitoh, YuichiVolume:
348
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2014.12.011
Date:
April, 2015
File:
PDF, 707 KB
english, 2015