Micro-tribo-mechanical properties of nanocrystalline TiN...

Tribology International 2015 / 08 Vol. 88

Micro-tribo-mechanical properties of nanocrystalline TiN thin films for small scale device applications

Kumar, D. Dinesh, Kumar, N., Kalaiselvam, S., Dash, S., Jayavel, R.
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Volume:
88
Language:
english
Journal:
Tribology International
DOI:
10.1016/j.triboint.2015.02.031
Date:
August, 2015
File:
PDF, 3.64 MB
english, 2015
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