Evaluation of the Electrical Properties, Piezoresistivity...

MRS Proceedings 2009 / 1 Vol. 1153

Evaluation of the Electrical Properties, Piezoresistivity and Noise of poly-SiGe for MEMS-above-CMOS applications

Gonzalez, Pilar, Lenci, Silvia, Haspeslagh, Luc, De Meyer, Kristin, Witvrouw, Ann
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Volume:
1153
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1153-A19-04
Date:
January, 2009
File:
PDF, 416 KB
english, 2009
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