Microscopic C-V measurements of SOI wafers by scanning capacitance microscopy
Ishida, T., Yoshida, H., Kishino, S.Volume:
27
Language:
english
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap:2004134
Date:
July, 2004
File:
PDF, 784 KB
english, 2004