Molecular dynamics study of the effect of titanium ion...

Applied Surface Science 2015 / 08 Vol. 345

Molecular dynamics study of the effect of titanium ion energy on surface structure during the amorphous TiO2 films deposition

Chen, Xian, Wang, Yan-Wu, Liu, Xin, Wang, Xiao-Yan, Wang, Xiao-Bo, An, Shu-Dong, Zhao, Yu-Qing
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Volume:
345
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.03.183
Date:
August, 2015
File:
PDF, 2.23 MB
english, 2015
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