n-Type Doping Characteristics of O-Implanted AlGaN

Journal of The Electrochemical Society 2004 Vol. 151; Iss. 12

n-Type Doping Characteristics of O-Implanted AlGaN

Nakano, Yoshitaka, Fujishima, Osamu, Kachi, Tetsu, Abe, Koji, Eryu, Osamu, Nakashima, Kenshiro, Jimbo, Takashi
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Volume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1808632
File:
PDF, 394 KB
english, 2004
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