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Nanomechanical properties of platinum thin films synthesized by atomic layer deposition
Mamun, M.A., Gu, D., Baumgart, H., Elmustafa, A.A.Volume:
265
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2015.01.037
Date:
March, 2015
File:
PDF, 1.25 MB
english, 2015